Vacuum Pump Inlet Trap For Heavy Contaminant Vacuum Processes
A high-capacity vacuum pump inlet trap designed to remove high quantities of contaminants from LPCVD, PECVD, MOCVD, HVPE, ALD and similar processes has been introduced
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Industry Links and Additional Information
Our regular customers know that our staff is always happy to share information and direct them to sources for vacuum products and services that we do not supply. In that same spirit, we hope to use this “resources” section of our website to provide access to helpful information related to general vacuum and vacuum processing applications.
Conversion Tables (PDF File)
Need to convert Pascal to Torr? Liters per minute to CFM? These handy charts give the most common conversions for absolute pressure and flow rates.
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Our list of links directs you to non commercial trade organizations and societies that provide technical information as well as product sourcing information.
Dry Scroll Pump Exhaust Traps Capture Carbon From Degrading
A line of robust vacuum pump exhaust traps for use with dry scroll pumps to remove carbon soot which can damage recirculation systems has been introduced
Cleaning up an LPCVD Silicon Nitride Deposition System
Cleaning up an LPCVD Silicon Nitride Deposition System A typical application for a multiple-stage vacuum pump trap is a reactor that deposits silicon nitride (Si3N4)
Throughput Increases in Silicon Dioxide Deposition Systems
Throughput Increases in Silicon Dioxide Deposition Systems Another common application for a multiple-stage vacuum pump trap is a CVD (chemical vapor deposition) process to deposit
Multi-Stage Pump Traps Clean Up Vacuum Systems
Multi-Stage Traps Clean Up Vacuum Systems Cleaning up an LPCVD Silicon Nitride Deposition System A typical application for a multiple-stage vacuum pump trap is a
Multi-Stage Traps Protect Vacuum Pump Systems
Multi-Stage Traps Clean Up Vacuum By Herbert W. Gatti and Lise C.H. Laurin The costs involved in maintaining vacuum processes in a manufacturing facility can