Vacuum Pump Inlet Trap For Heavy Contaminant Vacuum Processes
A high-capacity vacuum pump inlet trap designed to remove high quantities of contaminants from LPCVD, PECVD, MOCVD, HVPE, ALD and similar processes has been introduced
A line of robust vacuum pump exhaust traps for use with dry scroll pumps to remove carbon soot which can damage recirculation systems has been introduced by Mass-Vac, Inc. of North Billerica, MA.
MV PosiTrap® Vacuum Pump Exhaust Traps are made from 304 SS and feature 0.1 micron polypropylene filter media that capture carbon soot from dry scroll pump degrading tip seals. Designed for pumps up to 25 and 50 CFM, they are offered in 4″ and 8″ dia. sizes and can be supplied in straight through and right angle designs with various termination options.
Ideally suited for use with oil-free Agilent, Anest Iwata, and Edwards scroll pumps and cryogen-free dilution refrigerators, MV PosiTrap® Vacuum
Pump Exhaust Traps are positively sealed to prevent blow-by and can be modified to meet custom OEM requirements. Designed for various analytical applications, they can include hose or 25-, 40-, or 50 mm KF flanges.
MV PosiTrap® Vacuum Pump Exhaust Traps are priced from $390 to $890, depending upon configuration. Price quotations are available upon request.
For more information contact:
Mass-Vac, Inc.
David Rolph, Marketing
247 Rangeway Rd. / P.O. Box 359
No. Billerica, MA 01862-0359
P:(978) 667-2393
F:(978)-671-0014
e-mail: drolph@massvac.com
A high-capacity vacuum pump inlet trap designed to remove high quantities of contaminants from LPCVD, PECVD, MOCVD, HVPE, ALD and similar processes has been introduced
A line of robust vacuum pump exhaust traps for use with dry scroll pumps to remove carbon soot which can damage recirculation systems has been introduced
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247 Rangeway Road
PO Box 359
North Billerica, MA 01862-0359
P: 978 667 2393
F: 978 671 0014
Email: sales@massvac.com
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